James A. O'Neill, PhD

Chief Technology Officer

Dr. O’Neill joined Entegris in 2014 as part of the ATMI acquisition. He currently serves as the company’s Chief Technology Officer.

At his former company, he was Senior Vice President with respon­sibility for the Electronic Materials Business. This included product technology responsibilities for critical wafer process steps such as deposition, surface cleaning and copper plating. In this capacity, he oversaw technology and product development, mar­keting strategy and new product introduction.

Prior to that, Dr. O’Neill was director of 14nm technology develop­ment at IBM where he led process development activities at both Albany Nanotech and East Fishkill facilities. With over 23 years of experience in research, development and manufacturing opera­tions for the semiconductor industry, Dr. O’Neill now leads global development efforts in new material solutions for the industry’s most challenging issues.

Dr. O’Neill earned a Ph.D. in Physical Chemistry at Columbia University and a Bachelor’s degree in Chemistry from Yale University.

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