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Ravikiran Attota, PhD

TSOM Project Leader
National Institute of Standards and Technology

Dr. Ravikiran Attota leads the TSOM (through-focus scanning optical microscopy) project at the US National Institute of Standards and Technology (NIST). While at NIST he developed the TSOM technology which transforms conventional optical microscopes into three-dimensional shape metrology tools with near sub-nanometer measurement resolution. TSOM achieves this by making use of the additional information available in the out-of-focus optical image data. Major tool vendors have integrated the TSOM technology into their tools, making it widely available to the semiconductor industry.

Dr. Attota has collaborated with several semiconductor organizations. He has been invited to present on TSOM at major international semiconductor companies and organizations such as IBM, SEMICON, SEMATECH, KLA Tencor, ASML, LAM Research, Carl Zeiss AG, NOVA, PTB, CEA-LETI, and Naval Research Center (NRC).

Dr. Attota has worked at NIST for the past 20 years and authored nearly 100 technical publications and has two patents. He is a recipient of the R&D 100 Award (for developing TSOM), Silver Medal Award from the US Department of Commerce, and AvH (Humboldt) fellowship from Germany.  He received his Ph.D. in mechanical engineering from the Indian Institute of Science, Bengaluru, India.

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